Bekpulatov I, Igamov B, Imanova G, Kamardin A. Vacuum devices and ion-assisted processes for forming functional coatings. Casp. Ener. [Internet]. 2024Aug.16 [cited 2024Dec.21];1(1):6-12. Available from: https://caspener.com/index.php/caspener/article/view/6